PARAMETERS AFFECTING ELECTRON-BEAM SENSITIVITY OF POLY(METHYL METHACRYLATE)

被引:34
作者
GIPSTEIN, E [1 ]
OUANO, AC [1 ]
JOHNSON, DE [1 ]
NEED, OU [1 ]
机构
[1] IBM CORP,RES DIV LAB,SAN JOSE,CA 95193
关键词
D O I
10.1147/rd.212.0143
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:143 / 153
页数:11
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