DIELECTRIC LOSS OF THIN OXIDE SURFACE LAYERS ON SILICON

被引：1

作者：

DORDA, G

机构：

来源：

SURFACE SCIENCE | 1969年 / 15卷 / 01期

关键词：

D O I：

10.1016/0039-6028(69)90063-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：14 / +

页数：1

共 19 条

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[10]

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