IMPROVED TECHNIQUE FOR VOLTAGE MEASUREMENT IN SCANNING-ELECTRON MICROSCOPE

被引：3

作者：

FLEMING, JP

WARD, EW

机构：

[1] Standard Telecommunication Laboratories, Harlow, Essex, London Road

[2] PO Research Station Dollis Hill

来源：

ELECTRONICS LETTERS | 1969年 / 5卷 / 18期

关键词：

D O I：

10.1049/el:19690330

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Some preliminary results from experiments designed to lead to quantitative voltage measurement in the scanning-electron microscope are presented. The experimental technique is based on the use of a control loop which stabilises the operating conditions of the secondary-electron collector of the scanning-electron microscope by appropriately defining the voltage at the output lead of the specimen. This technique has already been described, and a version of it has been used for quantitative voltage measurement with a low-energy electron beam. The results described here show improvement in linearity and extension of useful dynamic range of the standard secondary-electron collector system provided in the ‘Stereoscan’ electron microscope. © 1969, The Institution of Electrical Engineers. All rights reserved.

引用

页码：435 / &