DOPPLER-SHIFT MEASUREMENTS OF ION ENERGY-DISTRIBUTION WIDTHS IN AN ELECTRON-CYCLOTRON RESONANCE MULTIPOLE HYBRID REACTOR

被引：12

作者：

FORSTER, J ^{[1
]}

KLEPPER, CC ^{[1
]}

BERRY, LA ^{[1
]}

GORBATKIN, SM ^{[1
]}

机构：

[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1992年 / 10卷 / 05期

关键词：

D O I：

10.1116/1.577873

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

An optical emission spectroscopy diagnostic was used to measure the Doppler broadening of a Cl+ emission line in a plasma generated in an electron cyclotron resonance/multipole hybrid reactor. The broadening of the emission line was found to be correlated with Langmuir probe measurements of the electron temperature. It is postulated that the Doppler broadening is related to the electron temperature through the plasma potential. Deviations to the correlation occur at high microwave powers, suggesting the existence of another type of ion broadening.

引用

页码：3114 / 3118

页数：5

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