A HIGH-CURRENT ION IMPLANTER WITH HYBRID SCANNING

被引：4

作者：

CAMPLAN, J ^{[1
]}

CHAUMONT, J ^{[1
]}

MEUNIER, R ^{[1
]}

GRABER, R ^{[1
]}

ROUGE, JC ^{[1
]}

STOCKER, R ^{[1
]}

WEGMANN, L ^{[1
]}

机构：

[1] BALZERS AG,FL-9496 BALZERS,LIECHTENSTEIN

来源：

NUCLEAR INSTRUMENTS & METHODS | 1980年 / 171卷 / 02期

关键词：

D O I：

10.1016/0029-554X(80)90497-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：245 / 250

页数：6

共 12 条

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[3]

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[5]

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[6]

CHAUMONT J, 1972, VIDE, V152, P105

[7] A STUDY OF BEAM DIVERGENCE IN AN ELECTROMAGNETIC ISOTOPE SEPARATOR [J].

CHAVET, I ;

BERNAS, R .

NUCLEAR INSTRUMENTS & METHODS, 1967, 47 (01) :77-&

[8] ION-IMPLANTATION [J].

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[9]

MARK M, Patent No. 607836

[10]

MARK M, 1975, ANGEWANDTE MESS REGE, V15, P221

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