MEASUREMENT AND ANALYSIS OF THE STATIC DEBYE-WALLER FACTOR OF CZ-SILICON WITH SMALL OXYGEN PRECIPITATES

被引:21
作者
IIDA, S [1 ]
SUGIYAMA, H [1 ]
SUGITA, Y [1 ]
KAWATA, H [1 ]
机构
[1] NATL LAB HIGH ENERGY PHYS,TSUKUBA,IBARAKI 305,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 06期
关键词
D O I
10.1143/JJAP.27.1081
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1081 / 1087
页数:7
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