DIFFUSION OF IMPURITIES IN POLYCRYSTALLINE SILICON

被引：86

作者：

KAMINS, TI

MANOLIU, J

TUCKER, RN

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1972年 / 43卷 / 01期

关键词：

D O I：

10.1063/1.1660842

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：83 / &

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