OXYGEN-UPTAKE OF OBLIQUELY DEPOSITED GE FILMS

被引:13
作者
MA, W [1 ]
ANDERSON, RM [1 ]
机构
[1] PURDUE UNIV,SCH ELECT ENGN,W LAFAYETTE,IN 47907
关键词
D O I
10.1063/1.1655395
中图分类号
O59 [应用物理学];
学科分类号
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页码:101 / 103
页数:3
相关论文
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