THE EFFECT OF AN ELECTRODE IN THE 1ST STAGE OF RIKEN ELECTRON-CYCLOTRON RESONANCE ION-SOURCE (ECRIS)

被引：12

作者：

NAKAGAWA, T

KAGEYAMA, T

机构：

[1] The Institute of Physical and Chemical Research (RIKEN), Saitama, 351-01, Hirosawa 2-1, Wako

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1991年 / 30卷 / 9A期

关键词：

ELECTRON CYCLOTRON RESONANCE ION SOURCE; ELECTRON DENSITY; ELECTRODE; COATING THE CHAMBER WALL; ARGON ION;

D O I：

10.1143/JJAP.30.L1588

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The beam intensity of argon ions was measured when an electrode was used in the first stage of a RIKEN Electron Cyclotron Resonance Ion Source (ECRIS). The enhancement of higher charge state performance was observed when we used the electrode. The beam intensity is strongly dependent on the bias voltage of the electrode. We also observed that larger current of higher-charge-state ions can be obtained when we used the electrode after coating the chamber wall with Al2O3.

引用

页码：L1588 / L1590

页数：3

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