APPLICATIONS OF THERMOANALYTICAL METHODS TO THE STUDY OF THIN-FILMS

被引:16
作者
GALLAGHER, PK [1 ]
机构
[1] OHIO STATE UNIV,DEPT MAT SCI & ENGN,COLUMBUS,OH 43210
来源
JOURNAL OF THERMAL ANALYSIS | 1992年 / 38卷 / 1-2期
关键词
APPLICATION OF TA; THIN FILMS;
D O I
10.1007/BF02109105
中图分类号
O414.1 [热力学];
学科分类号
摘要
Studies of the formation and properties of thin films is a growing area in both science and technology. Characterization of these films and the processes by which they are prepared is a major factor in understanding, controlling, and optimizing their synthesis and usefulness. Thermal methods can play an important role in such studies, provided that they can overcome the difficulties imposed by the massive amount of associated substrate. Unless one is studying the film - substrate interaction, the substrate's presence only serves to decrease the sensitivity by diluting or reducing the thermal effect being measured. The three basic strategies that have evolved are discussed and examples described. One approach is to remove the film from the substrate, when this is appropriate and feasible, and then study the film separately. A second method is to use larger samples and careful measurements in an effort to overcome the reduced sensitivity. The final means is to develop very sensitive and/or selective techniques to investigate the film and its potential interactions with the substrate.
引用
收藏
页码:17 / 26
页数:10
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