INVESTIGATION OF SPUTTERING OF ALUMINUM USING ATOMIC-ABSORPTION SPECTROSCOPY

被引：42

作者：

STIRLING, AJ

WESTWOOD, WD

机构：

来源：

关键词：

D O I：

10.1063/1.1658742

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：742 / &

共 13 条

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[5] SPUTTERING YIELDS OF METALS FOR AR+ AND NE+ IONS WITH ENERGIES FROM 50 TO 600 EV
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WEHNER, GK
[J]. JOURNAL OF APPLIED PHYSICS, 1961, 32 (03) : 365 - &
[6] MCDANIEL EW, 1964, COLLISON PHENOMENA I
[7] MITCHELL AGC, 1961, RESONANCE RADIATION
[8] VERWENDUNG VON SCHWINGQUARZEN ZUR WAGUNG DUNNER SCHICHTEN UND ZUR MIKROWAGUNG
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[J]. ZEITSCHRIFT FUR PHYSIK, 1959, 155 (02): : 206 - 222
[9] ENERGY DISTRIBUTION OF SPUTTERED CU ATOMS
STUART, RV
WEHNER, GK
[J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (06) : 1819 - &
[10] Wehner G.K., 1955, ADV ELECTRON EL P, V7, P239