DENSITY-MEASUREMENT OF O-ATOMS IN HELICON WAVE OXYGEN DISCHARGE BY 2-PHOTON LASER-INDUCED FLUORESCENCE

被引：8

作者：

KADOTA, K

KONNO, Y

AOTO, K

SHOJI, T

SATO, T

机构：

[1] Plasma Science Center, Nagoya University, Chikusa-ku, Nagoya

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 7B期

关键词：

2-PHOTON LASER-INDUCED FLUORESCENCE; ATOMIC OXYGEN DENSITY; ABSOLUTE CALIBRATION; ATOMIC OXYGEN IN PLASMA; HELICON OXYGEN PLASMA;

D O I：

10.1143/JJAP.33.4308

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ground-state O atoms in oxygen plasma have been detected by means of two-photon laser-induced fluorescence at 226 nm. A calibration method for obtaining the absolute O atom density was established, using O atoms produced by photodissociation of molecular oxygen with 226 nm photons. The O atom density in helicon wave oxygen discharge was determined, and a typical value was 1.3 x 10(19) m(-3) at a gas pressure of 50 mTorr and electron density of 5.2 x 10(16) m(-3). Spatial and temporal variations of the O atom density have been successfully measured.

引用

页码：4308 / 4311

页数：4

共 10 条

[1] ABSOLUTE 2-PHOTON ABSORPTION AND 3-PHOTON IONIZATION CROSS-SECTIONS FOR ATOMIC OXYGEN [J].