LASER-INDUCED FLUORESCENCE OF OXYGEN-ATOMS IN A PLASMA REACTOR

被引：30

作者：

HANCOCK, G

TOOGOOD, MJ

机构：

[1] Physical Chemistry Laboratory, Oxford OX1 3QZ, South Parks Road

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 01期

关键词：

D O I：

10.1063/1.107486

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Two-photon laser-induced fluorescence (LIF) of ground-state oxygen atoms following excitation of the 2p3 3p1 3P-2p4 3P transition has been investigated in a rf parallel-plate plasma reactor. Stimulated emission on the 2p3 3p1 3P-2p3 3s1 3S transition is readily detected, and leads to marked nonlinearities in the LIF signal as a function of O-atom concentration. Absolute concentrations have been determined as a function of gas composition in CF4/O2 mixtures, and shown to depend on the measured wall loss rates. The method is used to indicate limitations in the use of optical emission as a diagnostic for O atoms.

引用

页码：35 / 37

页数：3

共 26 条

[1] 2-PHOTON-EXCITED STIMULATED-EMISSION FROM ATOMIC OXYGEN IN FLAMES AND COLD GASES [J].

ALDEN, M ;

WESTBLOM, U ;

GOLDSMITH, JEM .

OPTICS LETTERS, 1989, 14 (06) :305-307

[2] QUENCHING OF 2-PHOTON-EXCITED H(3S, 3D) AND O(3P 3P2,1,0) ATOMS BY RARE-GASES AND SMALL MOLECULES [J].

BITTNER, J ;

KOHSEHOINGHAUS, K ;

MEIER, U ;

JUST, T .

CHEMICAL PHYSICS LETTERS, 1988, 143 (06) :571-576

[3] OXYGEN ATOM ACTINOMETRY REINVESTIGATED - COMPARISON WITH ABSOLUTE MEASUREMENTS BY RESONANCE-ABSORPTION AT 130 NM [J].

BOOTH, JP ;

JOUBERT, O ;

PELLETIER, J ;

SADEGHI, N .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (02) :618-626

[4] OXYGEN AND FLUORINE ATOM KINETICS IN ELECTRON-CYCLOTRON RESONANCE PLASMAS BY TIME-RESOLVED ACTINOMETRY [J].

BOOTH, JP ;

SADEGHI, N .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (02) :611-620

[5] SPATIALLY AND TEMPORALLY RESOLVED LASER-INDUCED FLUORESCENCE MEASUREMENTS OF CF2 AND CF RADICALS IN A CF4 RF PLASMA [J].

BOOTH, JP ;

HANCOCK, G ;

PERRY, ND ;

TOOGOOD, MJ .

JOURNAL OF APPLIED PHYSICS, 1989, 66 (11) :5251-5257

[6] LASER-INDUCED FLUORESCENCE DETECTION OF CF AND CF2 RADICALS IN A CF4/O2 PLASMA [J].

BOOTH, JP ;

HANCOCK, G ;

PERRY, ND .

APPLIED PHYSICS LETTERS, 1987, 50 (06) :318-319

[7] STUDY OF VOLUME AND SURFACE PROCESSES IN LOW-PRESSURE RADIO-FREQUENCY PLASMA REACTORS BY PULSED EXCITATION METHODS .1. HYDROGEN ARGON PLASMA [J].

BOUCHOULE, A ;

RANSON, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (02) :317-326

[8]

Brake M., 1983, Plasma Chemistry and Plasma Processing, V3, P63, DOI 10.1007/BF00566028

[9] EPR INVESTIGATION OF PLASMA-CHEMICAL RESIST ETCHING IN O-2 AND O-2/CF4 DISCHARGES [J].

BREITBARTH, FW ;

DUCKE, E ;

TILLER, HJ .

PLASMA CHEMISTRY AND PLASMA PROCESSING, 1990, 10 (03) :377-399

[10] OPTICAL-EMISSION SPECTROSCOPY OF REACTIVE PLASMAS - A METHOD FOR CORRELATING EMISSION INTENSITIES TO REACTIVE PARTICLE DENSITY [J].

COBURN, JW ;

CHEN, M .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) :3134-3136

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