SPATIALLY AND TEMPORALLY RESOLVED LASER-INDUCED FLUORESCENCE MEASUREMENTS OF CF2 AND CF RADICALS IN A CF4 RF PLASMA

被引：150

作者：

BOOTH, JP ^{[1
]}

HANCOCK, G ^{[1
]}

PERRY, ND ^{[1
]}

TOOGOOD, MJ ^{[1
]}

机构：

[1] UNIV OXFORD,PHYS CHEM LAB,S PARKS RD,OXFORD OX1 3QZ,ENGLAND

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 11期

关键词：

D O I：

10.1063/1.343712

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：5251 / 5257

页数：7

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