IN-SITU MEASUREMENT OF GROWTH-RATE BY LASER DIFFRACTION DURING CDTE SINGLE-CRYSTAL GROWTH FROM THE VAPOR-PHASE

被引:2
作者
YANG, BL
ISSHIKI, M
ZHANG, CP
HUANG, XM
YU, XL
机构
[1] CHINESE ACAD SCI,CHANGCHUN INST PHYS,CHANGCHUN 130021,PEOPLES R CHINA
[2] SHANDONG UNIV,INST CRYSTAL MAT,JINAN 250100,PEOPLES R CHINA
关键词
D O I
10.1016/0022-0248(94)00734-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The feasibility of a far-field single-slit laser diffraction technique for in-situ growth rate measurements in physical vapour transport was demonstrated with CdTe single crystals. With a special crystal growth ampoule and a furnace with high optical quality windows, a resolution of better than 1 mu m was achieved. It was found that the growth rate of CdTe decreases significantly with growth time. In addition, the dependence of the growth rate on supersaturation (Delta T) was investigated.
引用
收藏
页码:399 / 402
页数:4
相关论文
共 10 条
[1]   SUBLIMATION GROWTH AND X-RAY TOPOGRAPHIC CHARACTERIZATION OF CDTE SINGLE-CRYSTALS [J].
BUCK, P ;
NITSCHE, R .
JOURNAL OF CRYSTAL GROWTH, 1980, 48 (01) :29-33
[2]   VAPOR GROWTH OF CDTE AS SUBSTRATE MATERIAL FOR HG1-XCDXTE EPITAXY [J].
GEIBEL, C ;
MAIER, H ;
SCHMITT, R .
JOURNAL OF CRYSTAL GROWTH, 1988, 86 (1-4) :386-390
[3]   VAPOR-PHASE TRANSPORT OF CADMIUM TELLURIDE [J].
IGAKI, K ;
MOCHIZUKI, K .
JOURNAL OF CRYSTAL GROWTH, 1974, 24 (OCT) :162-165
[4]  
ISSHIKI M, 1992, WIDE GAP 2 6 COMPOUN, pCH1
[5]   EFFECT OF SUPERSATURATION ON THE VAPOR-PHASE TRANSPORT OF CDTE [J].
MOCHIZUKI, K .
JOURNAL OF CRYSTAL GROWTH, 1981, 53 (02) :355-360
[7]   PHYSICAL VAPOR TRANSPORT OF CADMIUM TELLURIDE IN CLOSED AMPOULES [J].
PALOSZ, W ;
WIEDEMEIER, H .
JOURNAL OF CRYSTAL GROWTH, 1993, 129 (3-4) :653-665
[8]  
YANG GG, 1986, MEAS TECH, P241
[9]   VERTICAL UNSEEDED VAPOR GROWTH OF LARGE CDTE CRYSTALS [J].
YELLIN, N ;
EGER, D ;
SHACHNA, A .
JOURNAL OF CRYSTAL GROWTH, 1982, 60 (02) :343-348
[10]  
ZANIO K, 1978, SEMICONDUCTORS SEMIM, V13