MOBILE ION EFFECTS IN LOW-TEMPERATURE SILICON-OXIDES

[1] ADAMS AC, 1981, J ELECTROCHEM SOC, V128, P1555

[2] ARUGA S, 1987, SID 87, P75

[3] Brotherton S. D., 1988, Solid State Devices. Proceedings of the 17th European Solid State Device Research Conference, ESSDERC '87, P135

[4] DETERMINATION OF SODIUM IN FURNACE ATMOSPHERES BY ATOMIC ABSORPTION SPECTROSCOPY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (09) : 1313 - &

[5] HILLEN MW, 1986, INSTABILITIES SILICO, V1, pCH8

[6] Nicollian E.H., 1982, MOS METAL OXIDE SEMI

[7] ION TRANSPORT PHENOMENA IN INSULATING FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (05) : 1664 - &

[8] SZE SM, 1983, VLSI TECHNOLOGY, pCH3

[1] ADAMS AC, 1981, J ELECTROCHEM SOC, V128, P1555

[2] ARUGA S, 1987, SID 87, P75

[3] Brotherton S. D., 1988, Solid State Devices. Proceedings of the 17th European Solid State Device Research Conference, ESSDERC '87, P135

[4] DETERMINATION OF SODIUM IN FURNACE ATMOSPHERES BY ATOMIC ABSORPTION SPECTROSCOPY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (09) : 1313 - &

[5] HILLEN MW, 1986, INSTABILITIES SILICO, V1, pCH8

[6] Nicollian E.H., 1982, MOS METAL OXIDE SEMI

[7] ION TRANSPORT PHENOMENA IN INSULATING FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (05) : 1664 - &

[8] SZE SM, 1983, VLSI TECHNOLOGY, pCH3