SCHOTTKY CONTACT CHARACTERIZATION OF SPUTTER-ETCHED SURFACE OF GAAS AND ITS RECOVERY BY ANNEALING

被引:5
作者
SUZUKI, N
KATAOKA, H
HARIU, T
SHIBATA, Y
机构
[1] Department of Electronic Engineering, Faculty of Engineering, Tohoku University
关键词
D O I
10.1143/JJAP.18.1879
中图分类号
O59 [应用物理学];
学科分类号
摘要
[No abstract available]
引用
收藏
页码:1879 / 1880
页数:2
相关论文
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