AN ION-NEUTRAL SPECIES COLLISION MODEL FOR PARTICLE SIMULATION OF GLOW-DISCHARGE

被引:89
作者
NANBU, K
KITATANI, Y
机构
[1] Institute of Fluid Science, Tohoku University, Sendai, 980-77, Katahira 2-1-1, Aoba-ku
关键词
D O I
10.1088/0022-3727/28/2/015
中图分类号
O59 [应用物理学];
学科分类号
摘要
An ion-neutral species collision model with charge exchange is developed for use in particle simulation of a glow discharge based on an extension of the theory of Langevin and Hasse. The validity of the model is checked by Monte Carlo calculation of drift velocity for He+-He, Ne+-Ne, Ar+-Ar and Kr+-Kr collisions. The results show good agreement with the experimental data and the solution by the moment method, especially for heavy gases. By proper choice of the cut-off value of the dimensionless impact parameter in the model, it is applicable to a collision of ions of energy 1 keV.
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页码:324 / 330
页数:7
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