A NOVEL STRUCTURAL SINGULARITY IN VACUUM-DEPOSITED THIN-FILMS - THE MECHANISM OF CRITICAL OPTIMIZATION OF THIN-FILM PROPERTIES

被引：54

作者：

VINCETT, PS

POPOVIC, ZD

MCINTYRE, L

机构：

来源：

THIN SOLID FILMS | 1981年 / 82卷 / 04期

关键词：

D O I：

10.1016/0040-6090(81)90479-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：357 / 376

页数：20

共 24 条

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