A NOVEL STRUCTURAL SINGULARITY IN VACUUM-DEPOSITED THIN-FILMS - THE MECHANISM OF CRITICAL OPTIMIZATION OF THIN-FILM PROPERTIES

被引:54
作者
VINCETT, PS
POPOVIC, ZD
MCINTYRE, L
机构
关键词
D O I
10.1016/0040-6090(81)90479-X
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:357 / 376
页数:20
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