PALLADIUM SILICIDE FORMATION OBSERVED BY AUGER-ELECTRON SPECTROSCOPY

被引：46

作者：

ROBINSON, GY ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455

来源：

APPLIED PHYSICS LETTERS | 1974年 / 25卷 / 03期

关键词：

D O I：

10.1063/1.1655421

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：158 / 160

页数：3

相关论文

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