CHEMICAL SPUTTERING OF NICKEL-OXIDE AND CARBIDE BY LOW-ENERGY (5-200EV) C+ AND O+ BEAMS

被引：7

作者：

HEON, K

KASI, S

RABALAIS, JW

机构：

来源：

JOURNAL OF CHEMICAL PHYSICS | 1987年 / 86卷 / 06期

关键词：

D O I：

10.1063/1.451978

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：3753 / 3755

页数：3

共 14 条

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