Large area and three-dimensional deposition of diamond-like carbon films for industrial applications

Diamond-like carbon layers develop excellent mechanical properties such as high hardness, high elasticity modulus and low friction coefficient. They show an antiadhesive effect in interaction with soft material surfaces. These properties make diamondlike carbon (DLC) films interesting for industrial application on tools and sliding machine parts. The utilization of DLC films in industry requires deposition technologies for the preparation of layers on large area and three-dimensional substrates. A microwave plasma method using one or two electron cyclotron resonance plasma sources for large area and three-dimensional deposition of DLC films is described. This method allows a wide variation in deposition parameters so that important properties of the films such as elasticity can be varied purposefully. Good adhesion can be reached on large areas and surfaces with complicated geometry without an interface layer. The microhardness, wear and sliding behaviour of diamond-like carbon films on various substrate materials have been investigated. Results of measurements of mechanical film properties are explained. Furthermore, some concrete examples of industrial applications of diamond-like carbon layers are shown.