PREPARATION OF AMORPHOUS I-C FILMS BY ION-ASSISTED METHODS

被引：22

作者：

SCHARFF, W

HAMMER, K

STENZEL, O

ULLMAN, J

VOGEL, M

FRAUENHEIM, T

EIBISCH, B

ROTH, S

SCHULZE, S

MUHLING, I

机构：

来源：

THIN SOLID FILMS | 1989年 / 171卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90041-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：157 / 169

页数：13

共 21 条

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