RECENT PROGRESS ON ELECTRON IMAGE PROJECTOR

被引：15

作者：

SCOTT, JP

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期

关键词：

D O I：

10.1116/1.569726

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1016 / 1021

页数：6

共 10 条

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[2]

FULLER C, 1977, 7TH ESSDERC EUR SOL

[3]

HENDERSON RC, 1976, 7TH P EL ION BEAM S, P204

[4]

MCGINTY GK, Patent No. 1443215

OKEEFFE, TW ;

VINE, J ;

HANDY, RM .

[6] PHOTOELECTRIC EMISSION FROM THE VALENCE BAND OF CESIUM IODIDE [J].

PHILIPP, HR ;

TAFT, EA .

[7] DISTORTION MEASUREMENTS IN AN ELECTRON IMAGE PROJECTOR [J].

SCOTT, JP .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06) :1309-1312

[8]

SCOTT JP, 1974, 6TH INT C EL ION BEA, P123

[9]

SEWELL H, UNPUBLISHED

[10] ELECTROSTATIC WAFER CHUCK FOR ELECTRON-BEAM MICROFABRICATION [J].

WARDLY, GA .