INDIUM TIN OXIDE THIN-FILMS FOR METALLIZATION IN MICROELECTRONIC DEVICES

被引：31

作者：

VENKATESAN, M

MCGEE, S

MITRA, U

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(89)90719-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：151 / 162

页数：12

共 24 条

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[7] Goodenough J. B., 1971, PROGR SOLID STATE CH, V5
[8] EFFECTS OF HEAT-TREATMENT ON OPTICAL AND ELECTRICAL-PROPERTIES OF INDIUM-TIN OXIDE-FILMS
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