ION-BEAM SPUTTERED INDIUM TIN OXIDE FOR INP SOLAR-CELLS

被引:19
作者
AHARONI, H
COUTTS, TJ
GESSERT, T
DHERE, R
SCHILLING, L
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词
D O I
10.1116/1.573896
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:428 / 431
页数:4
相关论文
共 24 条
[1]  
BAWA SS, 1983, P SOC PHOTO-OPT INST, V428, P22, DOI 10.1117/12.936295
[2]   THE INFLUENCE OF INPUT POWER ON THE PERFORMANCE OF RF SPUTTERED ITO-INP SOLAR-CELLS [J].
COUTTS, TJ ;
PEARSALL, NM ;
TARRICONE, L .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (02) :140-144
[3]  
COUTTS TJ, 1985, 7TH P EC PHOT SOL EN
[4]   THE EFFECT OF ANNEALING ON THE OPTICAL-PROPERTIES OF INDIUM TIN OXIDE-FILMS [J].
DIETRICH, A ;
SCHMALZBAUER, K ;
HOFFMANN, H ;
SZCZYRBOWSKI, J .
THIN SOLID FILMS, 1984, 122 (01) :19-29
[5]   PREPARATION OF SN-DOPED IN2O3 (ITO) FILMS AT LOW DEPOSITION TEMPERATURES BY ION-BEAM SPUTTERING [J].
FAN, JCC .
APPLIED PHYSICS LETTERS, 1979, 34 (08) :515-517
[6]   ELECTRICAL-PROPERTIES AND DEFECT MODEL OF TIN-DOPED INDIUM OXIDE LAYERS [J].
FRANK, G ;
KOSTLIN, H .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 27 (04) :197-206
[7]   PROPERTIES OF INDIUM TIN OXIDE THIN-FILMS PREPARED BY REACTIVE EVAPORATION [J].
HABERMEIER, HU .
THIN SOLID FILMS, 1981, 80 (1-3) :157-160
[8]   EFFECTS OF HEAT-TREATMENT ON OPTICAL AND ELECTRICAL-PROPERTIES OF INDIUM-TIN OXIDE-FILMS [J].
HAINES, WG ;
BUBE, RH .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (01) :304-307
[9]   OPTICAL-PROPERTIES OF TRANSPARENT AND HEAT-REFLECTING INDIUM TIN OXIDE-FILMS - THE ROLE OF IONIZED IMPURITY SCATTERING [J].
HAMBERG, I ;
GRANQVIST, CG .
APPLIED PHYSICS LETTERS, 1984, 44 (08) :721-723
[10]   DEPOSITION OF CONDUCTING AND TRANSPARENT THIN-FILMS OF INDIUM TIN OXIDE BY REACTIVE ION PLATING [J].
MACHET, J ;
GUILLE, J ;
SAULNIER, P ;
ROBERT, S .
THIN SOLID FILMS, 1981, 80 (1-3) :149-155