MORPHOLOGY AND SEMICONDUCTING PROPERTIES OF VACUUM-EVAPORATED THICK CADMIUM-SULFIDE FILMS PREPARED BY THE HOT WALL TECHNIQUE

被引:14
作者
DHERE, NG
PARIKH, NR
机构
[1] Instituto Militar de Engenharia, Departamento de Ciência dos Materiasis, Urca, Rio de Janeiro, RJ, Pça Gen Tiburcio
关键词
D O I
10.1016/0040-6090(79)90196-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Cadmium sulphide films of thickness 2-30 μm (useful in the fabrication of solar cells, transducers etc.) were deposited onto glass substrates by the hot wall technique under high ((1-3)×10-3 Pa) and very high ((1-3)×10-6 Pa) vacua. Their morphology and semiconducting properties were studied using X-ray diffraction, reflection high energy electron diffraction, scanning electron microscopy, optical absorption spectroscopy and Hall effect measurements. Substrate and wall temperatures of 175-200°C and 350-375°C respectively were found to be suitable for obtaining surface grains of large size (2.0-5.0 μm) and fairly smooth cadmium sulphide films with a one-dimensional {00.1} texture orientation. The growth texture, crystallographic forms and faceting improved with a better vacuum and with deposition rates of about 0.5 μm min-1. An electron energy level with an activation energy of about 0.22 eV was detected in most films. Films deposited at higher source temperatures showed high electron concentrations and low mobilities which were attributed to excess cadmium in these films. © 1979.
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收藏
页码:257 / 264
页数:8
相关论文
共 27 条
[1]   THICK EPITAXIAL FILMS OF CUBIC ZINC SULFIDE DEPOSITED BY A HOT WALL TECHNIQUE [J].
BEHRNDT, ME ;
MORENO, SC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (03) :494-+
[2]  
BERRY RW, 1968, THIN FILM TECHNOLOGY, P413
[3]  
BOER KW, NSFRANNAER7203478A03, P31
[4]   VARIATIONS IN RESISTIVITY OF EVAPORATED FILMS OF CADMIUM-SULFIDE [J].
BUCKLEY, RW ;
WOODS, J .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1973, 6 (09) :1084-1089
[5]   VAPOR-DEPOSITED THIN-FILM PIEZOELECTRIC TRANSDUCERS [J].
DEKLERK, J ;
KELLY, EF .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1965, 36 (04) :506-&
[6]   STRUCTURE AND SEMICONDUCTING PROPERTIES OF CADMIUM SELENIDE FILMS [J].
DHERE, NG ;
PARIKH, NR ;
FERREIRA, A .
THIN SOLID FILMS, 1977, 44 (01) :83-91
[7]  
DHERE NG, 1977, 7TH P INT VAC C 3RD, P1931
[8]   AC PHOTORESPONSE OF A LARGE-AREA IMAGING CDS-CDTE HETEROJUNCTION [J].
FRAAS, LM ;
BLEHA, WP ;
GRINBERG, J ;
JACOBSON, AD .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (02) :584-590
[9]  
Fred S., 1966, ADV ENERG CONVERS, V6, P201
[10]   NEW CADMIUM SULFIDE EVAPORATION SOURCE [J].
GALLA, RT .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1965, 36 (03) :403-&