SAW DISPERSION AND FILM-THICKNESS MEASUREMENT BY ACOUSTIC MICROSCOPY

被引：18

作者：

WEGLEIN, RD

机构：

[1] Hughes Research Laboratories, Malibu, CA 90265

来源：

APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 03期

关键词：

D O I：

10.1063/1.91099

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The reflection acoustic microscope has been used to measure SAW velocity dispersion and to indirectly measure the film thickness in a layered composite consisting of Au on a Si substrate. A quantitative thickness determination was made via the acoustic material signature technique, that is nondestructive and noncontacting. A theoretical prediction of SAW dispersion is in excellent agreement with these measurements.

引用

页码：215 / 217

页数：3

共 9 条

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