SELF-ALIGNED SILICIDES OR METALS FOR VERY LARGE-SCALE INTEGRATED-CIRCUIT APPLICATIONS

被引：91

作者：

MURARKA, SP

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.583514

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1325 / 1331

页数：7

共 37 条

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