XPS ANALYSIS OF THE GETTER MECHANISM AND GETTER ACTIVATION PROCESS

Surface composition and oxidation of the getter alloys Zr(V(x)Fe1-x)2, of the intermetallic compounds ZrMn2 and TiFe, and of the elemental metals, Zr, Ti and Mn were studied by means of photoelectron spectroscopy after exposure to O2 and heating up of 700 K. Good getter materials dissolve surface contaminants in the bulk upon activation at high temperature and are then very reactive at room temperature for gettering. The minimal temperature needed for activation is determined by the diffusion of oxygen, which varies strongly with bulk composition.