HIGHLY CONDUCTIVE AND TRANSPARENT GA-DOPED EPITAXIAL ZNO FILMS ON SAPPHIRE BY CVD

被引:121
作者
ATAEV, BM
BAGAMADOVA, AM
DJABRAILOV, AM
MAMEDOV, VV
RABADANOV, RA
机构
[1] Institute of Physics, Daghestan Scientific Centre, the Russian Academy of Sciences, Makhachkala
关键词
CHEMICAL VAPOR DEPOSITION (CVD); ZINC OXIDE; GALLIUM;
D O I
10.1016/0040-6090(94)09485-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:19 / 20
页数:2
相关论文
共 3 条
[1]  
Abduev A.Kh., 1987, IZV AKAD NAUK SSSR N, V23, P1928
[2]   OPTICAL-PROPERTIES OF SPUTTER-DEPOSITED ZNO-AL THIN-FILMS [J].
JIN, ZC ;
HAMBERG, I ;
GRANQVIST, CG .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (10) :5117-5131
[3]   HIGHLY CONDUCTIVE AND TRANSPARENT ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING [J].
MINAMI, T ;
NANTO, H ;
TAKATA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05) :L280-L282