CHARACTERISTICS AND ANALYSIS OF A THIN-FILM INDUCTOR WITH CLOSED MAGNETIC-CIRCUIT STRUCTURE

被引：36

作者：

YAMAGUCHI, M

ARAKAWA, S

OHZEKI, H

HAYASHI, Y

ARAI, KI

机构：

[1] Research Institute of Electrical Communication. Tohoku University, 980, Sendai Aoba-Ku

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1992年 / 28卷 / 05期

关键词：

D O I：

10.1109/20.179702

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A trial spiral inductor with closed magnetic circuit was fabricated by RF sputtering machine and photolithography techniques. The inductance was twice as large as that of a reference sandwiched inductor. We analyzed the frequency characteristics of the proposed inductor from three points of view: Inner current distribution, flux distribution and eddy current in the magnetic film. The calculated results agree with the measured ones.

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页码：3015 / 3017

页数：3

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