ANALYSIS OF THE INDUCTANCE AND THE STRAY CAPACITANCE OF THE DRY-ETCHED MICRO INDUCTORS

被引：27

作者：

YAMAGUCHI, M

MATSUMOTO, M

OHZEKI, H

ARAI, KI

机构：

[1] Research Institute of Electrical Communication, Tohoku University, Aoba, Sendai, 980

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1991年 / 27卷 / 06期

关键词：

D O I：

10.1109/20.278811

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thin film inductors with meander coil or spiral coil were examined systematically. The minimum line spacing of the inductors was 1.5-mu-m. In case of air core inductors, both inductance and stray capacitance are calculated from the dimension of the inductors and they agreed very well with measured ones. With the application of magnetic thin film, the inductance is increased and the degree of increase was proportional to the length of the coil. It is found that the capacitance between conductor and magnetic film is very significant and needs special consideration.

引用

页码：5274 / 5276

页数：3

共 9 条

[1] DESIGN OF PLANAR RECTANGULAR MICROELECTRONIC INDUCTORS [J].