ENERGIES OF CARBON PLASMA BEAMS IN THE DEPOSITION OF DIAMOND-LIKE COATINGS WITH THE PULSED-ARC-DISCHARGE METHOD

The carbon plasma ion energies produced by the pulsed filtered are-discharge method have been measured as a function of the anode-cathode voltage. The energies were determined by using the electro-optical time-of-flight method. The highest anode-cathode voltage was 4 kV and yielded the energy of 140 eV for the plasma ions. In addition, it was demonstrated that a rather slight change of the parameters in the arc-discharge method has a strong effect on the plasma ion energies and the properties of the diamond-like coatings prepared.