FORMATION OF OHMIC CONTACTS TO N-GAAS BY ION-BEAM MIXING AND ANNEALING

被引:5
作者
BARNARD, WO
MALHERBE, JB
LACQUET, BM
机构
[1] UNIV PRETORIA,DEPT PHYS,PRETORIA 0001,SOUTH AFRICA
[2] RAND AFRIKAANS UNIV,MAT LAB,JOHANNESBURG 2000,SOUTH AFRICA
关键词
D O I
10.1016/0169-4332(88)90005-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:437 / 444
页数:8
相关论文
共 19 条
[1]   THE FORMATION OF SILICIDES FROM THIN-FILMS OF SOME RARE-EARTH-METALS [J].
BAGLIN, JE ;
HEURLE, FMD ;
PETERSSON, CS .
APPLIED PHYSICS LETTERS, 1980, 36 (07) :594-596
[2]   ION-BEAM MIXING OF AU-GE AND AU-GE-NI DEPOSITED ON GAAS [J].
BHATTACHARYA, RS ;
RAI, AK ;
EZIS, A ;
RASHID, MH ;
PRONKO, PP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2316-2319
[3]  
BOTHA AP, 1986, MATER RES SOC S P, V54, P421
[4]  
BOWER RW, 1971, Patent No. 3600797
[5]   ALLOYED OHMIC CONTACTS TO GAAS [J].
BRASLAU, N .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :803-807
[6]   CHEMICAL-REACTION AT THE IN ON GAAS(110) INTERFACE [J].
CHIN, KK ;
KENDELEWICZ, T ;
NEWMAN, N ;
LINDAU, I ;
SPICER, WE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (04) :955-958
[7]  
CHRISTOU A, 1977, 6TH P BIENN CORN C, P167
[8]  
FATHY D, 1984, MATER RES SOC S P, V25, P557
[9]  
FURUKAWA S, 1986, MATER RES SOC S P, V54, P207
[10]   AUGER STUDIES ON RAPID GRAIN-BOUNDARY DIFFUSION OF GE THROUGH AU [J].
INGREY, S ;
MACLAURIN, B .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :358-361