HETERODYNE FIZEAU INTERFEROMETER FOR TESTING FLAT SURFACES

被引：11

作者：

BARNES, TH

机构：

来源：

APPLIED OPTICS | 1987年 / 26卷 / 14期

关键词：

D O I：

10.1364/AO.26.002804

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2804 / 2809

页数：6

共 15 条

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[3]

CRANE R, 1969, APPL OPTICS, V8, P538

[4]

Dandliker R., 1973, Optics Communications, V9, P412, DOI 10.1016/0030-4018(73)90284-8

[5] MEASUREMENT OF OPTICAL FLATNESS [J].

DEW, GD .

JOURNAL OF SCIENTIFIC INSTRUMENTS, 1966, 43 (07) :409-&

[6]

DEW GD, 1967, NPL1 OPT METR REP

[7] HIGH-PERFORMANCE REAL-TIME HETERODYNE INTERFEROMETRY [J].

MASSIE, NA ;

NELSON, RD ;

HOLLY, S .

[8]

MOTTIER FM, 1978, P SOC PHOTOOPT INSTR, V153, P146

[9]

MURTY MVR, 1978, OPTICAL SHOP TESTING

[10] METHOD FOR EVALUATING LATERAL SHEARING INTERFEROGRAMS [J].

RIMMER, MP .

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