ALIGNED MULTILAYER STRUCTURE GENERATION BY ELECTRON MICRO-PROJECTION

[1] ANGER K, UNPUBLISHED

[2] FRIEDRICH F, 1976, 7TH EL ION BEAM SCI, P340

[3] FROSIEN J, 1977, P INT C MICROLITHOGR, P175

[4] ELECTRON-PROJECTION MICROFABRICATION SYSTEM [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1135 - 1145

[5] KOOPS H, 1968, OPTIK, V28, P518

[6] LISCHKE B, UNPUBLISHED

[7] LISCHKE B, 1978, 8TH P S EL ION BEAM, V78, P160

[8] MEYER A, 1976, 7TH P INT C EL ION B, P332

[9] POLITYCKI A, 1978, SIEMENS FORSCH ENTW, V7, P28

[1] ANGER K, UNPUBLISHED

[2] FRIEDRICH F, 1976, 7TH EL ION BEAM SCI, P340

[3] FROSIEN J, 1977, P INT C MICROLITHOGR, P175

[4] ELECTRON-PROJECTION MICROFABRICATION SYSTEM [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1135 - 1145

[5] KOOPS H, 1968, OPTIK, V28, P518

[6] LISCHKE B, UNPUBLISHED

[7] LISCHKE B, 1978, 8TH P S EL ION BEAM, V78, P160

[8] MEYER A, 1976, 7TH P INT C EL ION B, P332

[9] POLITYCKI A, 1978, SIEMENS FORSCH ENTW, V7, P28