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A SIMPLE TECHNIQUE TO DEPOSIT MOLYBDENUM THIN-FILMS

被引：10
作者：
OKUYAMA, F
机构：
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1982年 / 28卷 / 02期
关键词：
D O I：
10.1007/BF00617143
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：125 / 128
页数：4
相关论文
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[3]   DEPOSITION OF MOLYBDENUM AND TUNGSTEN FILMS FROM VAPOR DECOMPOSITION OF CARBONYLS [J].
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DHEURLE, FM .
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[4]  
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[5]   NEEDLE CRYSTALS ARISING FROM DISCHARGE-INDUCED DECOMPOSITION OF HEXACARBONYLTUNGSTEN MOLECULES [J].
OKUYAMA, F .
JOURNAL OF CRYSTAL GROWTH, 1980, 49 (03) :531-540
[6]   CATHODIC NEEDLE GROWTH FROM MO(CO)6 AND CR(CO)6 VAPORS AT LOWER ELECTRIC-FIELDS [J].
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APPLIED PHYSICS, 1980, 22 (01) :39-46
[7]  
OKUYAMA F, UNPUB
[8]   PLASMA-PROMOTED DEPOSITION OF THIN INORGANIC FILMS [J].
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