SURFACE AND INTERFACE ANALYSIS BY NONRESONANT MULTIPHOTON IONIZATION OF SPUTTERED NEUTRALS

被引:14
作者
PALLIX, JB
GILLEN, KT
BECKER, CH
机构
关键词
D O I
10.1016/0168-583X(88)90709-4
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:912 / 917
页数:6
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