SURFACE-ANALYSIS OF CONTAMINATED GAAS - COMPARISON OF NEW LASER-BASED TECHNIQUES WITH SIMS

被引：37

作者：

BECKER, CH

GILLEN, KT

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573065

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1347 / 1349

页数：3

共 7 条

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