MASS-SPECTROSCOPY OF SPUTTERED NEUTRALS AND ITS APPLICATION FOR SURFACE ANALYSIS

被引:100
作者
OECHSNER, H
GERHARD, W
机构
[1] UNIV WURZBURG,PHYS INST,WURZBURG,WEST GERMANY
[2] UNIV CLAUSTHAL,PHYS INST TECH,LEIBNIZSTR 4,D 3392 CLAUSTHAL,WEST GERMANY
关键词
D O I
10.1016/0039-6028(74)90132-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:480 / 488
页数:9
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