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NEW TECHNIQUE FOR ELEMENTAL ANALYSIS OF THIN SURFACE LAYERS OF SOLIDS
被引:95
作者
:
COBURN, JW
论文数:
0
引用数:
0
h-index:
0
COBURN, JW
KAY, E
论文数:
0
引用数:
0
h-index:
0
KAY, E
机构
:
来源
:
APPLIED PHYSICS LETTERS
|
1971年
/ 19卷
/ 09期
关键词
:
D O I
:
10.1063/1.1653948
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:350 / &
相关论文
共 9 条
[1]
PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE
COBURN, JW
论文数:
0
引用数:
0
h-index:
0
COBURN, JW
KAY, E
论文数:
0
引用数:
0
h-index:
0
KAY, E
[J].
APPLIED PHYSICS LETTERS,
1971,
18
(10)
: 435
-
&
[2]
A SYSTEM FOR DETERMINING MASS ENERGY OF PARTICLES INCIDENT ON A SUBSTRATE IN A PLANAR DIODE SPUTTERING SYSTEM
COBURN, JW
论文数:
0
引用数:
0
h-index:
0
COBURN, JW
[J].
REVIEW OF SCIENTIFIC INSTRUMENTS,
1970,
41
(08)
: 1219
-
&
[3]
A UNIVERSAL MICROSECTIONING TECHNIQUE FOR DIFFUSON
GUPTA, D
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引用数:
0
h-index:
0
GUPTA, D
TSUI, RTC
论文数:
0
引用数:
0
h-index:
0
TSUI, RTC
[J].
APPLIED PHYSICS LETTERS,
1970,
17
(07)
: 294
-
&
[4]
EVALUATION OF SILICON NITRIDE LAYERS OF VARIOUS COMPOSITION BY BACKSCATTERING AND CHANNELING-EFFECT MEASUREMENTS
GYULAI, J
论文数:
0
引用数:
0
h-index:
0
GYULAI, J
MEYER, O
论文数:
0
引用数:
0
h-index:
0
MEYER, O
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
MAYER, JW
RODRIGUEZ, V
论文数:
0
引用数:
0
h-index:
0
RODRIGUEZ, V
[J].
JOURNAL OF APPLIED PHYSICS,
1971,
42
(01)
: 451
-
+
[5]
METASTABLE ATOMS AND MOLECULES - MEASUREMENTS OF THEIR UNUSUAL PROPERTIES IN HIGHLY EXCITED STATES REVEAL A NEW AREA FOR INVESTIGATION
MUSCHLITZ, EE
论文数:
0
引用数:
0
h-index:
0
MUSCHLITZ, EE
[J].
SCIENCE,
1968,
159
(3815)
: 599
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+
[6]
MULTILAYER THIN-FILM ANALYSIS BY ION BACKSCATTERING
PICRAUX, ST
论文数:
0
引用数:
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h-index:
0
PICRAUX, ST
VOOK, FL
论文数:
0
引用数:
0
h-index:
0
VOOK, FL
[J].
APPLIED PHYSICS LETTERS,
1971,
18
(05)
: 191
-
&
[7]
ANALYSIS OF SURFACES UTILIZING SPUTTER ION SOURCE INSTRUMENTS
SOCHA, AJ
论文数:
0
引用数:
0
h-index:
0
SOCHA, AJ
[J].
SURFACE SCIENCE,
1971,
25
(01)
: 147
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&
[8]
ALLOY SPUTTERING STUDIES WITH IN-SITU AUGER ELECTRON SPECTROSCOPY
TARNG, ML
论文数:
0
引用数:
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h-index:
0
TARNG, ML
WEHNER, GK
论文数:
0
引用数:
0
h-index:
0
WEHNER, GK
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1971,
8
(01):
: 23
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[9]
DETERMINATION OF SURFACE IMPURITY CONCENTRATION PROFILES BY NUCLEAR BACKSCATTERING
ZIEGLER, JF
论文数:
0
引用数:
0
h-index:
0
ZIEGLER, JF
BAGLIN, JEE
论文数:
0
引用数:
0
h-index:
0
BAGLIN, JEE
[J].
JOURNAL OF APPLIED PHYSICS,
1971,
42
(05)
: 2031
-
&
←
1
→
共 9 条
[1]
PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE
COBURN, JW
论文数:
0
引用数:
0
h-index:
0
COBURN, JW
KAY, E
论文数:
0
引用数:
0
h-index:
0
KAY, E
[J].
APPLIED PHYSICS LETTERS,
1971,
18
(10)
: 435
-
&
[2]
A SYSTEM FOR DETERMINING MASS ENERGY OF PARTICLES INCIDENT ON A SUBSTRATE IN A PLANAR DIODE SPUTTERING SYSTEM
COBURN, JW
论文数:
0
引用数:
0
h-index:
0
COBURN, JW
[J].
REVIEW OF SCIENTIFIC INSTRUMENTS,
1970,
41
(08)
: 1219
-
&
[3]
A UNIVERSAL MICROSECTIONING TECHNIQUE FOR DIFFUSON
GUPTA, D
论文数:
0
引用数:
0
h-index:
0
GUPTA, D
TSUI, RTC
论文数:
0
引用数:
0
h-index:
0
TSUI, RTC
[J].
APPLIED PHYSICS LETTERS,
1970,
17
(07)
: 294
-
&
[4]
EVALUATION OF SILICON NITRIDE LAYERS OF VARIOUS COMPOSITION BY BACKSCATTERING AND CHANNELING-EFFECT MEASUREMENTS
GYULAI, J
论文数:
0
引用数:
0
h-index:
0
GYULAI, J
MEYER, O
论文数:
0
引用数:
0
h-index:
0
MEYER, O
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
MAYER, JW
RODRIGUEZ, V
论文数:
0
引用数:
0
h-index:
0
RODRIGUEZ, V
[J].
JOURNAL OF APPLIED PHYSICS,
1971,
42
(01)
: 451
-
+
[5]
METASTABLE ATOMS AND MOLECULES - MEASUREMENTS OF THEIR UNUSUAL PROPERTIES IN HIGHLY EXCITED STATES REVEAL A NEW AREA FOR INVESTIGATION
MUSCHLITZ, EE
论文数:
0
引用数:
0
h-index:
0
MUSCHLITZ, EE
[J].
SCIENCE,
1968,
159
(3815)
: 599
-
+
[6]
MULTILAYER THIN-FILM ANALYSIS BY ION BACKSCATTERING
PICRAUX, ST
论文数:
0
引用数:
0
h-index:
0
PICRAUX, ST
VOOK, FL
论文数:
0
引用数:
0
h-index:
0
VOOK, FL
[J].
APPLIED PHYSICS LETTERS,
1971,
18
(05)
: 191
-
&
[7]
ANALYSIS OF SURFACES UTILIZING SPUTTER ION SOURCE INSTRUMENTS
SOCHA, AJ
论文数:
0
引用数:
0
h-index:
0
SOCHA, AJ
[J].
SURFACE SCIENCE,
1971,
25
(01)
: 147
-
&
[8]
ALLOY SPUTTERING STUDIES WITH IN-SITU AUGER ELECTRON SPECTROSCOPY
TARNG, ML
论文数:
0
引用数:
0
h-index:
0
TARNG, ML
WEHNER, GK
论文数:
0
引用数:
0
h-index:
0
WEHNER, GK
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1971,
8
(01):
: 23
-
&
[9]
DETERMINATION OF SURFACE IMPURITY CONCENTRATION PROFILES BY NUCLEAR BACKSCATTERING
ZIEGLER, JF
论文数:
0
引用数:
0
h-index:
0
ZIEGLER, JF
BAGLIN, JEE
论文数:
0
引用数:
0
h-index:
0
BAGLIN, JEE
[J].
JOURNAL OF APPLIED PHYSICS,
1971,
42
(05)
: 2031
-
&
←
1
→