MULTILAYER THIN-FILM ANALYSIS BY ION BACKSCATTERING

被引：24

作者：

PICRAUX, ST

VOOK, FL

机构：

来源：

关键词：

D O I：

10.1063/1.1653620

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：191 / &

共 10 条

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