STRUCTURE OF HYDROGENATED AMORPHOUS SILICON-CARBON ALLOYS AS INVESTIGATED BY EXTENDED X-RAY-ABSORPTION FINE-STRUCTURE

被引：43

作者：

PASCARELLI, S

BOSCHERINI, F

MOBILIO, S

EVANGELISTI, F

机构：

[1] UNIV LAQUILA,DIPARTIMENTO ENERGET,I-67100 LAQUILA,ITALY

[2] UNIV ROME LA SAPIENZA,DIPARTMENTO FIS,I-00185 ROME,ITALY

来源：

PHYSICAL REVIEW B | 1992年 / 45卷 / 04期

关键词：

D O I：

10.1103/PhysRevB.45.1650

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have studied the local structure of hydrogenated amorphous silicon-carbon alloy films, a-Si1-xCx:H, by measuring the extended x-ray-absorption fine structure at the Si K edge. We find that first-coordination-shell average bond lengths are 2.35 angstrom for Si-Si and 1.86 angstrom for Si-C and are constant with concentration to within perpendicular-to 0.015 angstrom. By comparing the composition of the first coordination shell around Si with the average concentration, we show that the alloy tends to be chemically ordered, in that heteroatomic bonds are preferred.

引用

页码：1650 / 1654

页数：5

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