CONVOLUTION AND DECONVOLUTION IN AUGER-ELECTRON SPECTROSCOPY, WITH APPLICATION TO SILICON

被引：14

作者：

ONSGAARD, JH ^{[1
]}

MORGEN, P ^{[1
]}

CREASER, RP ^{[1
]}

机构：

[1] PHILLIP COLLEGE,WODEN 2600,ACT,AUSTRALIA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 01期

关键词：

D O I：

10.1116/1.569435

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：44 / 49

页数：6

共 24 条

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[18] AN ALGORITHM FOR LEAST-SQUARES ESTIMATION OF NONLINEAR PARAMETERS
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[19] PALMBERG PW, 1972, HDB AUGER ELECTRON S
[20] PALMBERG PW, 1972, ELECTRON SPECTROSCOP, P835