ELECTROCHROMIC PROPERTIES OF RF-SPUTTERED TUNGSTIC OXIDE FILM PREPARED FROM A W-METAL TARGET

被引：17

作者：

AKRAM, H

KITAO, M

YAMADA, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 09期

关键词：

D O I：

10.1063/1.343956

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4364 / 4367

页数：4

共 10 条

[1] PREPARATION AND AGING OF SPUTTERED TUNGSTIC OXIDE-FILMS [J].

AKRAM, H ;

TATSUOKA, H ;

KITAO, M ;

YAMADA, S .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (05) :2039-2043

[2] MATERIAL AND DEVICE PROPERTIES OF A SOLID-STATE ELECTROCHROMIC DISPLAY [J].

BARNA, GG .

JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (02) :153-173

[3] INFLUENCE OF SUBSTOICHIOMETRY, HYDROGEN CONTENT AND CRYSTALLINITY ON OPTICAL AND ELECTRICAL-PROPERTIES OF HXWOY THIN-FILMS [J].

DENEUVILLE, A ;

GERARD, P .

JOURNAL OF ELECTRONIC MATERIALS, 1978, 7 (04) :559-588

[4] CHARACTERIZATION OF A WO3 THIN-FILMS BEFORE AND AFTER COLORATION [J].

GERARD, P ;

DENEUVILLE, A ;

COURTHS, R .

THIN SOLID FILMS, 1980, 71 (02) :221-236

[5] REACTIVE SPUTTERING OF METALS IN OXIDIZING ATMOSPHERES [J].

HELLER, J .

THIN SOLID FILMS, 1973, 7 (02) :163-176

[6] ELECTROCHEMICHROMISM OF RF REACTIVELY SPUTTERED TUNGSTEN-OXIDE FILMS [J].

KANEKO, H ;

MIYAKE, K ;

TERAMOTO, Y .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) :4416-4421

[7]

KITAO M, 1988, SOLID STATE IONIC DE, P359

[8] ELECTROCHROMISM IN COMPOSITE-MATERIAL AU-WO3 [J].

SICHEL, EK ;

GITTLEMAN, JI ;

ZELEZ, J .

APPLIED PHYSICS LETTERS, 1977, 31 (02) :109-111

[9] MODIFICATION OF THE ELECTROCHROMIC RESPONSE OF WO3 THIN-FILMS BY OXYGEN BACKFILLING [J].

SUN, SS ;

HOLLOWAY, PH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :336-340

[10] OSCILLATOR STRENGTH OF SMALL-POLARON ABSORPTION IN WOX (XLESS-THAN-OR-EQUAL-TO3) ELECTROCHROMIC THIN-FILMS [J].

YOSHIMURA, T .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (03) :911-919

← 1 →