Mass Spectrometric Detection of Intermediates in Chemical Vapor Deposition of Si(3)N(4)

[1] Airey A. C., 1973, Proceedings of the British Ceramic Society, P305

[2] BILLY M, 1956, CR HEBD ACAD SCI, V242, P137

[3] CHU TL, 1967, J ELECTROCHEM SOC, V114, P716

[4] GLEMSER O, 1958, Z ANORG ALLG CHEM, V298, P134

[5] SILICON NITRIDE THIN FILMS FROM SICL4 PLUS NH3 - PREPARATION AND PROPERTIES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (05) : 525 - +

[6] KATO A, 1972, YOGYO KYOKAISHI, V80, P114

[7] LI SS, 1975, J ELECTROCHEM SOC, V122, P1405

[8] DETECTION OF LARGE WATER CLUSTERS BY A LOW RF-QUADRUPOLE MASS FILTER [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (04) : 516 - 517

[9] LIN SS, 1973, TR739 AMMRC

[10] SYNTHESIS, CHARACTERIZATION, AND CONSOLIDATION OF SI3N4 OBTAINED FROM AMMONOLYSIS OF SICL4 [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1973, 56 (12) : 628 - 633

[1] Airey A. C., 1973, Proceedings of the British Ceramic Society, P305

[2] BILLY M, 1956, CR HEBD ACAD SCI, V242, P137

[3] CHU TL, 1967, J ELECTROCHEM SOC, V114, P716

[4] GLEMSER O, 1958, Z ANORG ALLG CHEM, V298, P134

[5] SILICON NITRIDE THIN FILMS FROM SICL4 PLUS NH3 - PREPARATION AND PROPERTIES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (05) : 525 - +

[6] KATO A, 1972, YOGYO KYOKAISHI, V80, P114

[7] LI SS, 1975, J ELECTROCHEM SOC, V122, P1405

[8] DETECTION OF LARGE WATER CLUSTERS BY A LOW RF-QUADRUPOLE MASS FILTER [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (04) : 516 - 517

[9] LIN SS, 1973, TR739 AMMRC

[10] SYNTHESIS, CHARACTERIZATION, AND CONSOLIDATION OF SI3N4 OBTAINED FROM AMMONOLYSIS OF SICL4 [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1973, 56 (12) : 628 - 633