THE EFFECT OF REFLECTED AND SECONDARY ELECTRONS ON LITHOGRAPHY WITH THE SCANNING TUNNELING MICROSCOPE

被引：18

作者：

MCCORD, MA

PEASE, RFW

机构：

来源：

关键词：

D O I：

10.1016/0039-6028(87)90168-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：278 / 284

页数：7

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PEASE, RFW .

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