LASER ENHANCED ADHESION OF COPPER-FILMS TO SAPPHIRE SUBSTRATES

被引:7
作者
PEDRAZA, AJ
GODBOLE, MJ
KENIK, EA
LOWNDES, DH
THOMPSON, JR
机构
[1] OAK RIDGE NATL LAB,DIV MET & CERAM,OAK RIDGE,TN 37831
[2] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
[3] UNIV TENNESSEE,DEPT PHYS & ASTRON,KNOXVILLE,TN 37996
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词
D O I
10.1116/1.575289
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1763 / 1767
页数:5
相关论文
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